Simulation and Design of Microsystems and Microstructures
Paper Listing
| Simulation Supported Design Of LIGA
Microsystems
Author(s): K.-R Kamper, J. Dopper, W. Ehrfeld, B. Hagemann, S.D.J. Hill & H.Lehr Pages: 8 Price: Free (open access) Size: 1,027 kb Copyright: WIT Press DOI: 10.2495/MIC950011 | Open Access  Details |
| Overview Of The CAEMENS Framework And
Optimization Of MEMS Using Statistical Optimal
Design Of Experiments
Author(s): S.B. Crary, J.R. Clark & O.S. Juma Pages: 8 Price: Free (open access) Size: 871 kb Copyright: WIT Press DOI: 10.2495/MIC950021 | Open Access Details |
| Experimental Results On The Behaviour Of
Micromechanical Structures Made By The LIGA
Technique
Author(s): C. LeBmollmann Pages: 9 Price: Free (open access) Size: 936 kb Copyright: WIT Press DOI: 10.2495/MIC950031 | Open Access Details |
| A Design System For Kinetic Micro Mechanical
Components
Author(s): J. Mehner & W. Dotzel Pages: 8 Price: Free (open access) Size: 1,191 kb Copyright: WIT Press DOI: 10.2495/MIC950041 | Open Access Details |
| Interdisciplinary Aspects Of Microsystem Design
Author(s): M.J. Schachler, A. Lahrmann & H. Reichl Pages: 7 Price: Free (open access) Size: 693 kb Copyright: WIT Press DOI: 10.2495/MIC950051 | Open Access Details |
| Design And Simulation Of Silicon And Metal
Microstructures
Author(s): E. Chowanietz & A. Lees Pages: 8 Price: Free (open access) Size: 798 kb Copyright: WIT Press DOI: 10.2495/MIC950061 | Open Access Details |
| LIDO: Mask Verification For LIGA Designs
Author(s): R. Briick & K. Hahn Pages: 8 Price: Free (open access) Size: 1,011 kb Copyright: WIT Press DOI: 10.2495/MIC950071 | Open Access Details |
| From CAD Through Manufacturing To Quality
Control Of Microstructures
Author(s): K.R. Scherer, H. Eggert, P. Buchberger, P. Stiller & U. Stucky Pages: 8 Price: Free (open access) Size: 1,052 kb Copyright: WIT Press DOI: 10.2495/MIC950081 | Open Access Details |
| Design And Analysis Of A Resonant Gyroscope
Suitable For Fabrication Using The LIGA Process
Author(s): L. Yao, E. Chowanietz & M. McCormick Pages: 9 Price: Free (open access) Size: 772 kb Copyright: WIT Press DOI: 10.2495/MIC950091 | Open Access Details |
| A Hybrid Actuator For Articulated Micro-grippers
Author(s): N. Troisfontaine & Ph. Bidaud Pages: 7 Price: Free (open access) Size: 518 kb Copyright: WIT Press DOI: 10.2495/MIC950101 | Open Access Details |
| A Computer Program For Ellipsometric Rough
Surface Measurements
Author(s): St. lovan, I. Boca & A. lovan Pages: 6 Price: Free (open access) Size: 510 kb Copyright: WIT Press DOI: 10.2495/MIC950111 | Open Access Details |
| An Architecture For Process Planning, Analysis
And Simulation In Microsystems Technology
Author(s): M. Huber & F. Neuscheler Pages: 8 Price: Free (open access) Size: 902 kb Copyright: WIT Press DOI: 10.2495/MIC950121 | Open Access Details |
| A Design Simulation System For Microstructures
Author(s): R.A. Adey, A. Neves, J.M.W. Baynham & S.M. Niku Pages: 8 Price: Free (open access) Size: 530 kb Copyright: WIT Press DOI: 10.2495/MIC950131 | Open Access Details |
| Coupled Field Calculations Of A Micromachined
Flow Sensor With Different Finite Element Analysis
Programmes
Author(s): S. Messner, N. Hey & H.E. Pavlicek Pages: 8 Price: Free (open access) Size: 785 kb Copyright: WIT Press DOI: 10.2495/MIC950141 | Open Access Details |
| Automated Simulation And Analysis Of
Electrostatic Micromotors
Author(s): T.B. Johansson, K. Hameyer & R. Belmans Pages: 8 Price: Free (open access) Size: 795 kb Copyright: WIT Press DOI: 10.2495/MIC950151 | Open Access Details |
| Simulation Of Microsystems Using A Behavioural
Hybrid Simulator Alecsis
Author(s): Z. Mrcarica, D. Glozic, V. Litovski & H. Better Pages: 8 Price: Free (open access) Size: 804 kb Copyright: WIT Press DOI: 10.2495/MIC950161 | Open Access Details |
| Specific Problems Of FEM Thermal Simulationsfor Microsystems
Author(s): A. Gotz, C. Cane & E. Lora-Tamayo Pages: 10 Page Range: 137 - 146 Price: Free (open access) Size: 969 kb Copyright: WIT Press DOI: 10.2495/MIC950171 | Open Access Details |
| A New Calculation Method Of Thermal
Environment In Microsystems And Experimental
Verification
Author(s): J. Helm Pages: 8 Price: Free (open access) Size: 569 kb Copyright: WIT Press DOI: 10.2495/MIC950181 | Open Access Details |
| Microsystems And Microstructures 155
Fluid Modelling In Micro Flow Channels
Author(s): M.J. Harper, C.M. Turner & J.E.A. Shaw Pages: 9 Price: Free (open access) Size: 1,003 kb Copyright: WIT Press DOI: 10.2495/MIC950191 | Open Access Details |
| 3D Coupled Electro-mechanical Simulations In
Microstructures
Author(s): T. Angulo, S. Marco & J. Samitier Pages: 10 Price: Free (open access) Size: 937 kb Copyright: WIT Press DOI: 10.2495/MIC950201 | Open Access Details |
| Modelling And Simulation Of Microresonators
With Meander Suspensions
Author(s): O.K. Fedder & K.H. Clark Pages: 9 Price: Free (open access) Size: 888 kb Copyright: WIT Press DOI: 10.2495/MIC950211 | Open Access Details |
| On The Simulation Of Subminiature Condenser
Microphones Using Finite Differences
Author(s): M. Pedersen, W. Olthuis & P. Bergveld Pages: 8 Price: Free (open access) Size: 750 kb Copyright: WIT Press DOI: 10.2495/MIC950221 | Open Access Details |
| A Linear Reluctance Self-oscillating Motor
Author(s): M. Rizzo Pages: 8 Price: Free (open access) Size: 559 kb Copyright: WIT Press DOI: 10.2495/MIC950231 | Open Access Details |
| Modular Solution Approach For Simulation Of
Coupled Physical Phenomena
Author(s): S. Schulte, A. Maurer & H. Bungartz Pages: 9 Price: Free (open access) Size: 933 kb Copyright: WIT Press DOI: 10.2495/MIC950241 | Open Access Details |
| Field Simulation Of The Elevation Force In A
Rotating Electrostatic Microactuator
Author(s): P. Di Barba, A. Saving & S. Wiak Pages: 5 Price: Free (open access) Size: 459 kb Copyright: WIT Press DOI: 10.2495/MIC950251 | Open Access Details |
| An Integrated Design And Simulation Tool For
Jit-structures
Author(s): A. Lahrmann Pages: 8 Price: Free (open access) Size: 718 kb Copyright: WIT Press DOI: 10.2495/MIC950261 | Open Access Details |
| Optimization Problems Of Semiconductor Gas
Sensors
Author(s): E.E. Gutman Pages: 8 Price: Free (open access) Size: 673 kb Copyright: WIT Press DOI: 10.2495/MIC950271 | Open Access Details |
| Optimization Of The Electrode Shapes Of
Micromachined Piezoelectric Microphones To
Minimise The Influence Of In-plane Stress On The
S/N Ratio
Author(s): R. Schellin, P. Bergveld, W. Olthuis, R. Kressman & B. Wagner Pages: 8 Price: Free (open access) Size: 763 kb Copyright: WIT Press DOI: 10.2495/MIC950281 | Open Access Details |
| A Knowledge Based Design And Simulation Tool
For U-systems
Author(s): A. Lahrmann Pages: 6 Price: Free (open access) Size: 638 kb Copyright: WIT Press DOI: 10.2495/MIC950291 | Open Access Details |
| Modelling Of Metal Alloy Contacts To
Semiconductor Substrate
Author(s): T. Rang Pages: 8 Price: Free (open access) Size: 698 kb Copyright: WIT Press DOI: 10.2495/MIC950301 | Open Access Details |
| A General CAD Concept And Design Framework
Architecture For Integrated Microsystems^
Author(s): A. Poppe, J.M. Kararn, K. Hoffmann, M. Rencz, B. Courtois, M. Glesner & V. Szekely Pages: 8 Price: Free (open access) Size: 803 kb Copyright: WIT Press DOI: 10.2495/MIC950311 | Open Access Details |
| Comparison Of Electrical Device Representations
Of Physical Differential Equations
Author(s): J. Bielefeld, G. Pelz & G. Zimmer Pages: 5 Price: Free (open access) Size: 427 kb Copyright: WIT Press DOI: 10.2495/MIC950321 | Open Access Details |
| An Investigation Of Computer Modelling For
Micro-injection Moulding
Author(s): S.D.J. Hill, K.R Kamper, U. Dasbach, J. DOpper, W. Erhfeld & M. Kaupert Pages: 9 Price: Free (open access) Size: 1,292 kb Copyright: WIT Press DOI: 10.2495/MIC950331 | Open Access Details |
| Low Temperature Wafer Bonding On Silicon
Nitride
Author(s): A.G. Pedrine, J.C. De Poorter, L. De Schepper & K. Baeif Pages: 8 Price: Free (open access) Size: 742 kb Copyright: WIT Press DOI: 10.2495/MIC950341 | Open Access Details |
| Development Of An Electrochemical
Microanalytical System: From Specification
To Realization
Author(s): W. SuB, H. Eggert, M. Gorges-Schleuter, W. Jakob K. Lindemann, W. Hoffman & R. Rapp Pages: 8 Price: Free (open access) Size: 1,364 kb Copyright: WIT Press DOI: 10.2495/MIC950351 | Open Access Details |
| Simulation Of Encapsulation Stress In A
Micromachined Silicon Membrane Pump
Author(s): G. Kelly, J. Alderman, C. Lyden & J. Barrett Pages: 7 Price: Free (open access) Size: 617 kb Copyright: WIT Press DOI: 10.2495/MIC950361 | Open Access Details |
| Modelling And Simulation Of An Intelligent
Motion Surface In MEMS
Author(s): W. Liu, P. Will & M. Pottenger Pages: 9 Price: Free (open access) Size: 989 kb Copyright: WIT Press DOI: 10.2495/MIC950371 | Open Access Details |
| Simulation Tools For Micro Electro Mechanical
Systems
Author(s): B. Folkmer & H. Sandmaier Pages: 8 Price: Free (open access) Size: 916 kb Copyright: WIT Press DOI: 10.2495/MIC950381 | Open Access Details |
| Simulation Supported Design Of Micromechanical
Sensors
Author(s): S. Majer & U. Mescheder Pages: 9 Price: Free (open access) Size: 780 kb Copyright: WIT Press DOI: 10.2495/MIC950391 | Open Access Details |
Transaction
WIT Transactions on The Built Environment
Volume
13
Print ISBN
978-1-85312-390-0
Edited By
R.A. Adey, Wessex Institute of Technology UK; A. Lahrmann, Technical University of Berlin, Germany; C. Lessmolmann, microParts GmbH, Germany
Electronic ISSN
1743-3509
Published
1995
Pages
350
