Author(s)

Z. Mrcarica, D. Glozic, V. Litovski & H. Better

Abstract

A behavioural hybrid simulator Alecsis is utilized for simulation of microelectromechanical systems (MEMS). Alecsis allows modelling of devices of different physical nature, and simulation of systems where instances of such models are invoked. As an example, a pressure sensing system comprising both micromechanical and electronic components is simulated. In this way consistent simulation results are obtained for the system as a whole, since effects of both mechanical and electrical coupling are modelled. 1. Introduction Micromechanical devices are usually simulated using comme

Keywords