Author(s)

L. Yao, E. Chowanietz & M. McCormick

Abstract

A recent surge of interest in miniature vibratory gyroscope, for applications as diverse as camera-shake compensation and automobile brake control, means that many researchers are now trying to design, simulate and fabricate these sensors. This paper presents details of a new design of miniaturised H type resonant gyroscope to be fabricated in electroformed metal using an emergent technology known as LIGA. The sensor features electrostatic drive and capacitive read out techniques. The paper describes the simulation aided design process that was used to obtain the final sensor structure and shows how a set of equation for the electrostatic-structural coupled field problem were derived and used in con

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