Author(s)

O.K. Fedder & K.H. Clark

Abstract

Surface-micromachined comb-drive resonators suspended by meander springs are modelled and simulated. General analytic expressions for lateral spring con- stants and effective mass of meander springs are derived and verified by finite- element simulations. The spring constant equations are accurate to within 1% over a wide range of geometries. Analytic, simulated, and measured resonant frequency values agree to within 0.3% for each of ten different microresonator designs. 1 Introduction Surface-micromachined structures have been adopted as the mechanical ele- ments in a variety of integrated microsystems, such as polysilicon microacceler- ometers, microresonator transducers, and active micromirror displays. Currently, these microstructur

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