Author(s)

S. Majer & U. Mescheder

Abstract

Simulation is essential for top down orientated development of micromechanical sensors. Finite element methods have been used to simulate mechanical and electrical behaviour of sensors. The coupling algorithm has been implemented into a commercial FEM-tool (ANSYS). The results of 3D anisotropic calculations have been applied to a two-axes-tilt-sensor. Optimized designs and fabrication process parameters are extracted from the calculated data. Introduction Top down approaches for microsystems (e.g. micromechanical sensors) are still not possible due to the high complexity of such systems. However, several groups have just presented interesting concepts and some results which will give support in the development of microsystems [1, 2]. Nevertheless, there is no satisfying solution for al

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