Author(s)

B. Folkmer & H. Sandmaier

Abstract

The application of simulation tools in MEMS design allows a quick and accurate prediction and optimization of specific system functions using a variety of sophisticated simulation programs on high end computer systems: e.g. finite element analysis for structural mechanics, thermal- and electrical field calculations or network and state simulators for simulations at system level as well as tailored programs for certain classes of sensors and actuators. The calculation of the system characteristics, considering coupled physical effects and distributed behaviour, generally is more complex since the necessary tools and know how, related to history, have been developed in diffe

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