Methods For Description Of Microelectro- Mechanical Device Models For System-level Simulation
Price
Free (open access)
Transaction
Volume
34
Pages
10
Published
1997
Size
949 kb
Paper DOI
10.2495/MIC970271
Copyright
WIT Press
Author(s)
Z. Mrcarica, Z. Randjelovic, M. Jakovljevic, V.B. Litovsku & H. Better
Abstract
Behavioural simulators and their modelling languages, so-called hardware description languages (HDL) enable simulation of electromechanical and other mixed-domain systems. For modelling of microelectromechanical devices, partial differential equations (PDE) are often necessary. They are not directly supported by HDLs, but can be described by some method of discretization. We have proven that simple, yet effective finite difference method can enable modelling of complex microelectromechanical devices. Our recent experiments have shown that finite element method is even better suited for application in a HDL. 1 Introduction Usage of technologies that are developed l
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