Author(s)

J.M. Gomez-Cama, O. Ruiz, S. Marco, J.M. Lopez- Villegas & J. Samitier

Abstract

A clear trend in Microsystems technology is towards the integration of mechanical and electronic functions. In many interfacing approaches, the interaction between the electronics and the mechanical parts is fundamental for the correct operation of the devices. Here we present how this interaction can be handled taking advantage of the possibilities of the analog hardware description languages. This modelling and simulation approach is applied to the joint simulation of a torsional capacitive accelerometer and the interfacing electronics. Notation cross-section b2

Keywords