Author(s)

J.-P. Fibers, C. Glingener, E. Voges, P. Schreiber, C. Wachter, W. Karthe, D. Krabe, R. Dumcke, H. Reichl, G. Hagner, S. Schroter, H. Bartelt, A. Stock, G. Bauer, W. Schafer, H. Sickinge & J Schwide

Abstract

Optical microsystems consist of micro-optical, integrated-optical, mechanical and packaging components. Due to the hybrid nature and the high complexity of these microsystems a general design strategy is

Keywords