Author(s)

K. Amaya, M. Uragou & S. Aoki

Abstract

An electro-magnetic field of an eddy current thickness sensor was analyzed for the purpose of improving measurement accuracy. Maxwell equations were discretized with the boundary element method. In order to facilitate the calculation, a quasi-static approximation and an axial symmetric ap- proximation were employed. A numerical integration formula with high accuracy was applied to evaluate a singular integral. A special element was developed for effective analysis of a thin film. It is found from numerical results that the radial component of magnetic flux density produced by the eddy current is greater than the axial componen

Keywords