Computational Solution Of A Two-phase Moving Boundary Problem With Two Moving Interfaces In Pulsed Laser Processing Of Semiconductors
Price
Free (open access)
Transaction
Volume
36
Pages
10
Published
2003
Size
426 kb
Paper DOI
10.2495/MB030041
Copyright
WIT Press
Author(s)
P. Přikryl, E. Gatskevich & R. ČernĂ½
Abstract
Computational solution of a two-phase moving boundary problem with two moving interfaces in pulsed laser processing of semiconductors P. PFikryll, E. Gatskevich2 & R. cerny3 a at he ma tical Institute of the Academy of Sciences of the Czech Republic, &tnd 25, 115 67 Prague I , Czech Republic 2~nstitute of Electronics, National Academy of Sciences of Belarus, 22 Logoiskii trakt, 220090 Minsk, Belarus :'~e~artment of Structural Mechanics, Faculty of Civil Engineering, Czech Technical University, Thdkurova 7, 166 29 Prague 6, Czech Republic Abstract A model of melting, evaporation and solidification of a binary alloy due to pulsed laser irradiation is formulated using the mass and internal energy balances in the liquid and solid phases, the vapor being assumed to be removed from the sample surface into vacuum instantaneously. The interface between the solid and liquid phases is modeled as a discontinuity surface where, in addition to balance conditions, an interface response function is formulat
Keywords